Is selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998
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22 results at MRS Spring Meeting 1998
Use of micro-mechanical techniques, AFM and MFM to access surface deformation in multilayered thin films
- T.W. Wu
- J.E. Frommer
- 1998
- MRS Spring Meeting 1998
Experimental investigations of the Sneddon solution and an improved solution for the analysis of nanoindentation data
- J.C. Hay
- G.M. Pharr
- 1998
- MRS Spring Meeting 1998
Thermal instability of the Cu-Ni interface above 200°C
- T.H. Westmore
- J.E.E. Baglin
- et al.
- 1998
- MRS Spring Meeting 1998
Applicability of Sneddon relationships to the real case of a rigid cone penetrating an infinite half space
- J.C. Hay
- A. Bolshakov
- et al.
- 1998
- MRS Spring Meeting 1998
High conductivity gate metallurgy for TFT/LCD's
- P.M. Fryer
- E.G. Colgan
- et al.
- 1998
- MRS Spring Meeting 1998
Deposition of highly conductive n+ silicon film for a-Si:H thin film transistor
- Y. Kuo
- K. Latzko
- 1998
- MRS Spring Meeting 1998
Templating nanopores into poly(methylsilsesquioxane): new low-dielectric coatings suitable for microelectronic applications
- J. Remenar
- C.J. Hawker
- et al.
- 1998
- MRS Spring Meeting 1998
Integration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Dynamic coercivity and thermal decay of magnetic media
- K.A. Rubin
- Jason Goldberg
- et al.
- 1998
- MRS Spring Meeting 1998