Publications

509 results at JES

Structural Composition of Polymers Relative to Their Plasma Etch Characteristics
- - Lester A. Pederson
- 2019
- JES
RIE Contamination of Etched Silicon Surfaces
- - L.M. Ephrath
  - R.S. Bennett
- 2019
- JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- - Israel Lerner
  - Jerome M. Eldridge
- 2019
- JES
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- - E.A. Irene
  - N.J. Chou
  - et al.
- 2019
- JES
Solar Cells on Large-Grain GaAs Thin Films
- - S.M. Vernon
  - A.E. Blakeslee
  - et al.
- 2019
- JES
Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- - L.M. Ephrarh
  - D.J. Dimaria
  - et al.
- 2019
- JES
An Electrochemically Sealed Al₂O₃ Passivation Layer for Aluminum Alloys
- - M.H. Lee
  - A. Homola
- 2019
- JES
AZ1350J as a Deep-U.V. Mask Material
- - B.J. Lin
- 2019
- JES
TiO2 Antireflection Coatings by a Low Temperature Spray Process
- - H.J. Hovel
- 2019
- JES
Electron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- - Hiroyuki Hiraoka
  - Adolfo R. Gutierrez
- 2019
- JES