Summary abstract: Theory of thin-film orientation by ion bombardment during deposition
- R. Mark Bradley
- James M.E. Harper
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
Date
Featured collections
Popular topics
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electrical properties of vacuum annealed Si surfaces
- J. Werner
- M. Renier
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Pressure and plasma effects on the properties of magnetron sputtered carbon films
- S.M. Rossnagel
- Michael A. Russak
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- M. Liehr
- J.E. Lewis
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electronically excited photodissociation and desorption of molecules on surfaces
- T.J. Chuang
- K. Domen
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: Metal-induced impurity states at the inP/transition-metal interface
- F. Schaffler
- W. Drube
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Advances in vacuum contamination control for electronic materials processing
- John F. O'Hanlon
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
An analysis of equations for flow in thin, rectangular channels
- John F. O Hanlon
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Compositional variations in doped iron oxide magnetic thin films
- B. Hermsmeier
- C.R. Brundle
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films