TiN metal hard mask removal with selectivity to tungsten and TiN liner
- S. Lippy
- L. Chen
- et al.
- 2013
- ECS Transactions
Conference paper
Publications
33 results at ECS Transactions
Stress characterization of tungsten-filled through silicon via arrays using very high resolution multi-wavelength raman spectroscopy
- Jeff Gambino
- Daniel Vanslette
- et al.
- 2011
- ECS Transactions
Conference paperThe role of oxygen in the development of Hf-base high-k/metal gate stacks for CMOS technologies
- E. Cartier
- 2010
- ECS Transactions
Conference paperIII-V photovoltaics - Recent developments and prospects
- N. Sosa
- Theodore G. Van Kessel
- et al.
- 2010
- ECS Transactions
Conference paperHigh-κ gate dielectrics for nanoscale CMOS devices: Status, challenges, and future
- Dae-Gyu Park
- Xinlin Wang
- 2010
- ECS Transactions
Conference paperInvestigation of band gap, band alignment and bonding states of the (TbxSc1-x)2O3/ Si system
- I. Geppert
- M. Eizenberg
- et al.
- 2010
- ECS Transactions
Conference paperIntegration of Germanium avalanche photodetectors on silicon for on-chip optical interconnects
- Solomon Assefa
- Fengnian Xia
- et al.
- 2010
- ECS Transactions
Conference paperDeposition of copper on ruthenium for Cu metallization
- J. Kelly
- O. Van Der Straten
- et al.
- 2010
- ECS Transactions
Conference paperApplications of epitaxy for semiconductor technology
- Devendra Sadana
- Stephen W. Bedell
- et al.
- 2010
- ECS Transactions
Conference paper300mm cold-wall UHV/CVD reactor for low-temperature epitaxial (100) silicon
- Thomas N. Adam
- Stephen W. Bedell
- et al.
- 2010
- ECS Transactions
Conference paper