Improved underlayers for acid amplified resists
- H.S. Sachdev
- R.W. Kwong
- et al.
- 1994
- Microelectronic Engineering
Publications
221 results at Microelectronic Engineering
SEM/EBIC characterization of degradation at mirrors of GaAs/AlGaAs laser diodes
- Abram Jakubowicz
- Albert Oosenbrug
- 1994
- Microelectronic Engineering
Using simulation to analyze integrated tool performance in semiconductor manufacturing
- John Mauer
- Roland Schelasin
- 1994
- Microelectronic Engineering
Early operating experience with the helios compact synchrotron x-ray source
- D.E. Andrews
- Chas N. Archie
- 1993
- Microelectronic Engineering
Comparison of the sidewall recombination in dry and wet etched InGaAs/InP wires
- B. Jacobs
- H. Zull
- et al.
- 1993
- Microelectronic Engineering
Carbon impurities at a Si-SiO2 interface
- S.I. Raider
- 1993
- Microelectronic Engineering
New model of a common origin for trapped holes and anomalous positive charge in MOS capacitors
- Y. Roh
- L.P. Trombetta
- et al.
- 1993
- Microelectronic Engineering
Fabrication and characterization of compact 100nm scale metal oxide semiconductor field effect transistors
- C. Reeves
- S.J. Wind
- et al.
- 1993
- Microelectronic Engineering
Microscopic mechanisms of interface state generation by electrical stress
- 1993
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- T. Leslie
- W. Arden
- et al.
- 1993
- Microelectronic Engineering