Publications

221 results at Microelectronic Engineering

Low temperature Al-Cu planarization by PVD Al-Cu-Ge alloys (Invited lecture)
- - R.V. Joshi
- 1997
- Microelectronic Engineering
Micromechanics: A toolbox for femtoscale science: "Towards a laboratory on a tip"
- - R. Berger
  - Ch. Gerber
  - et al.
- 1997
- Microelectronic Engineering
Electrical characterization of Si/Si_0.7Ge_0.3 quantum well wires fabricated by low damage CF₄ reactive ion etching
- - K.Y. Lee
  - S.J. Koester
  - et al.
- 1997
- Microelectronic Engineering
Potential fluctuations due to P_b centres at the Si/SiO₂ interface
- - M.J. Uren
  - K.M. Brunson
  - et al.
- 1997
- Microelectronic Engineering
A conic primitive-based pattern generator for electron-beam lithography of diffractive optical elements
- - H. Rothuizen
  - D. Prongué
  - et al.
- 1997
- Microelectronic Engineering
Explanation for the oxide thickness dependence of breakdown characteristics of metal-oxide-semiconductor structures
- - D.J. Dimaria
- 1997
- Microelectronic Engineering
Magnetic tunnel junctions fabricated at tenth-micron dimensions by electron beam lithography
- - S. Rishton
  - Y. Lu
  - et al.
- 1997
- Microelectronic Engineering
Gate oxide characterization with ballistic electron emission microscopy
- - R. Ludeke
  - H.J. Wen
- 1997
- Microelectronic Engineering
On the relationship between stress induced leakage currents and catastrophic breakdown in ultra-thin SiO₂ based dielectrics
- - D.A. Buchanan
  - J.H. Stathis
  - et al.
- 1997
- Microelectronic Engineering
Submicrometer p-Type SiGe modulation-doped field-effect transistors for high speed applications
- - I. Adesida
  - M. Arafa
  - et al.
- 1997
- Microelectronic Engineering