- Physical Review B - CMMP
36 results for Yu Zhu
- Solid-State Electronics
Nitride etching with hydrofluorocarbons III: Comparison of C4H9F and CH3F for low-k′ nitride spacer etch processes
Nitride etching with hydrofluorocarbons. I. Selective etching of nitride over silicon and oxide materials by gas discharge optimization and selective deposition of fluorocarbon polymer
A study on the long-term degradation of crystalline silicon solar cells metallized with Cu electroplating
- ECS J. Solid State Sci. Technol.