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R. Johnson- Daniel C. Edelstein
- M. Rizzolo
- et al.
- 2020
- IEDM 2020
- N. Gong
- Malte J. Rasch
- et al.
- 2022
- IEDM 2022
- K. Cheng
- A. Khakifirooz
- et al.
- 2012
- IEDM 2012
- K. Cheng
- A. Khakifirooz
- et al.
- 2009
- IEDM 2009
- Romain Lallement
- Daniel Schmidt
- et al.
- 2023
- OEN 2023
- Nathan Ip
- Michael Belyansky
- et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
- Jing Guo
- Dustin W. Janes
- et al.
- 2019
- MEMS/NEMS/MOEMS 2019