Quantitative nanoscale imaging of lattice distortions in epitaxial semiconductor heterostructures using nanofocused X-ray Bragg projection ptychography
- S.O. Hruszkewycz
- M.V. Holt
- et al.
- 2012
- Nano Letters
Publications
116 results for Conal Murray
Silicide-phase evolution and platinum redistribution during silicidation of Ni 0.95Pt 0.05/Si(100) specimens
- Praneet Adusumilli
- David N. Seidman
- et al.
- 2012
- Journal of Applied Physics
Understanding stress gradients in microelectronic metallization
- Conal E. Murray
- E. Todd Ryan
- et al.
- 2012
- Powder Diffraction
Evolution of stress gradients in Cu films and features induced by capping layers
- Conal E. Murray
- E.T. Ryan
- et al.
- 2012
- Microelectronic Engineering
Nanoscale strain characterization in microelectronic materials using X-ray diffraction
- Conal E. Murray
- Andrew Ying
- et al.
- 2012
- Powder Diffraction
Invariant x-ray elastic constants and their use in determining hydrostatic stress
- 2011
- Journal of Applied Physics
32 and 45 nm radiation-hardened-by-design (RHBD) SOI latches
- Kenneth P. Rodbell
- David F. Heidel
- et al.
- 2011
- IEEE TNS
Probing strained semiconductor structures with nanoscale x-ray diffraction
- 2011
- SEM Annual Conference on Experimental and Applied Mechanics 2011
Nanoscale silicon-on-insulator deformation induced by stressed liner structures
- Conal E. Murray
- Andrew Ying
- et al.
- 2011
- Journal of Applied Physics
Manipulating stress in Cu/low-k dielectric nanocomposites
- Conal E. Murray
- Paul R. Besser
- et al.
- 2011
- Applied Physics Letters