200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules
- C. Wang
- S.W. Nam
- et al.
- 2013
- IEDM 2013
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29 results for Dirk Pfeiffer
A Novel Graded Antireflective Coating with Built-in Hardmask Properties Enabling 65nm and Below CMOS Device Patterning
- K. Babich
- N. Fukiage
- et al.
- 2003
- IEDM 2003
Resistive Random Access Memory Filament Visualization and Characterization Using Photon Emission Microscopy
- Franco Stellari
- Ernest Y. Wu
- et al.
- 2021
- IEEE Electron Device Letters
Epitaxial graphene nanoribbon array fabrication using BCP-assisted nanolithography
- Guanxiong Liu
- Yanqing Wu
- et al.
- 2012
- ACS Nano
Critical BEOL aspects of the fabrication of a thermally-assisted MRAM device
- E.J. O'sullivan
- Daniel C. Edelstein
- et al.
- 2015
- ECS Meeting 2015 Phoenix
Verification of untrusted chips using trusted layout and emission measurements
- Franco Stellari
- Peilin Song
- et al.
- 2014
- HOST 2014
Graphene technology for RF and THz applications
- Alberto Valdes-Garcia
- Fengnian Xia
- et al.
- 2013
- IMS 2013
A novel integrated reliability test system for BEOL TDDB study
- Jifeng Chen
- Peilin Song
- et al.
- 2012
- ISTFA 2012
MARVEL Malicious alteration recognition and verification by emission of light
- Peilin Song
- Franco Stellari
- et al.
- 2011
- HOST 2011
Sputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs
- Marinus Hopstaken
- Dirk Pfeiffer
- et al.
- 2010
- ECS Transactions