Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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8 results for Daniel Schmidt

Hardware Based Performance Assessment of Vertical-Transport Nanosheet Technology
- - Gen Tsutsui
  - Seunghyun Song
  - et al.
- 2022
- IEDM 2022
TSV Stress Evolution Mapping using in-line Raman Spectroscopy
- - Stefan Schoeche
  - Daniel Schmidt
  - et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
Scatterometry based methodologies for characterization of MRAM technology
- - Manasa Medikonda
  - Daniel Schmidt
  - et al.
- 2022
- SPIE Advanced Lithography 2022
Highly Selective SiGe Dry Etch Process for the Enablement of Stacked Nanosheet Gate-All-Around Transistors
- - Curtis Durfee
  - Subhadeep Kal
  - et al.
- 2021
- ECS Meeting 2021
Nanosheet Metrology Opportunities for Technology Readiness
- - Mary Breton
  - Daniel Schmidt
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Measuring Local CD Uniformity in EUV vias with scatterometry and machine learning
- - Dexin Kong
  - Daniel Schmidt
  - et al.
- 2020
- SPIE Advanced Lithography 2020
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement
- - Daniel Schmidt
  - Aron Cepler
  - et al.
- 2022
- IEEE Trans Semicond Manuf
High-NA EUV Exposure Tool Implications to Chip and Mask Layouts
- - Daniel Schmidt
- 2023
- VLSI Technology 2023