A self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature
- G.M. Cohen
- C. Cabral Jr.
- et al.
- 2002
- MRS Proceedings 2002
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194 results for Christian Lavoie
A self-aligned silicide process for thin silicon-on-insulator MOSFETs and bulk MOSFETs with shallow junctions
- G.M. Cohen
- C. Cabral Jr.
- et al.
- 2001
- MRS Proceedings 2001
Templating Effects On C54-Tisi2 Formation In Ternary Reactions.
- A. Quintero
- M. Libera
- et al.
- 1998
- Microscopy and Microanalysis
Crystallization of hafnium-oxide-based ferroelectrics for BEOL integration
- Martin M. Frank
- Eduard A. Cartier
- et al.
- 2022
- EDTM 2022
1T1R mushroom PCM cell device using epitaxial GeSbTe
- Guy Cohen
- Amlan Majumdar
- et al.
- 2023
- E\PCOS 2023
The influence of alloying on the phase formation sequence of ultra-thin nickel silicide films and on the inheritance of texture
- F.A. Geenen
- E. Solano
- et al.
- 2018
- Journal of Applied Physics
Controlling the formation and stability of ultra-thin nickel silicides - An alloying strategy for preventing agglomeration
- F.A. Geenen
- K. Van Stiphout
- et al.
- 2018
- Journal of Applied Physics
Impact of laser anneal on NiPt silicide texture and chemical composition
- C. Feautrier
- Ahmet S. Ozcan
- et al.
- 2017
- Journal of Applied Physics
Phase formation and texture of thin nickel germanides on Ge(001) and Ge(111)
- B. De Schutter
- K. Van Stiphout
- et al.
- 2016
- Journal of Applied Physics
Crystallographic texture of C54 titanium disilicide as a function of deep submicron structure geometry
- V. Svilan
- K.P. Rodbell
- et al.
- 1997
- Journal of Electronic Materials