Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for Tenko Yamashita

Subtractive Ru Interconnect Enabled by Novel Patterning Solution for EUV Double Patterning and TopVia with Embedded Airgap Integration for Post Cu Interconnect Scaling
- - Chris Penny
  - Koichi Motoyama
  - et al.
- 2022
- IEDM 2022
Vertical-Transport Nanosheet Technology for CMOS Scaling beyond Lateral-Transport Devices
- - Hemanth Jagannathan
  - Brent Anderson
  - et al.
- 2021
- IEDM 2021
Full Bottom Dielectric Isolation to Enable Stacked Nanosheet Transistor for Low Power and High Performance Applications
- - J. Zhang
  - Julien Frougier
  - et al.
- 2019
- IEDM 2019