New materials for laser repair of active matrix liquid crystal displays

Abstract

New materials have been developed for the repair of electrical open defects in AMLCD panel circuitry The metal-containing precursors are volatile, easily pyrolyzed to high purity conducting metal, and are decomposed at temperatures which will not damage the glass substrate or thin film circuitry. New materials have been developed for additive metal repair as well as additive passivation repair. The repair of data line metallurgy on prototype arrays has been achieved, resulting in electrical resistances of the repaired interconnects which were comparable to those of unrepaired interconnects of identical geometry.