Publications

20 results for P. Coane

Improved underlayers for acid amplified resists
- - H.S. Sachdev
  - R.W. Kwong
  - et al.
- 1994
- Microelectronic Engineering
High Performance 0.1 μm CMOS Devices with 1.5 V Power Supply
- - Y. Taur
  - S.J. Wind
  - et al.
- 1993
- IEDM 1993
The design, fabrication and characterization of 0.15 μm MOS devices
- - H.I. Hanafi
  - P. Coane
  - et al.
- 1993
- ESSDERC 1993
Mixed e-beam/optical lithography process for the fabrication of sub-0.25-μm poly gates
- - Keith T. Kwietniak
  - Michael G. Rosenfield
  - et al.
- 1993
- Microlithography 1993
Fully-scaled 0.25-micron bipolar technology using variable shaped electron-beam lithography
- - Philip J. Coane
  - Kaolin G. Chiong
  - et al.
- 1993
- Microlithography 1993
A room temperature 0.1 μm CMOS on SOI
- - G. Shahidi
  - C. Blair
  - et al.
- 1993
- VLSI Technology 1993
A high performance 0.15 μm CMOS
- - G. Shahidi
  - J. Warnock
  - et al.
- 1993
- VLSI Technology 1993
Indium Channel Implant for Improved Short-Channel Behavior of Submicrometer NMOSFET's
- - G. Shahidi
  - Bijan Davari
  - et al.
- 1993
- IEEE Electron Device Letters
A Scaled 0.25- μm Bipolar Technology Using Full e-Beam Lithography
- - John D. Cressler
  - James Warnock
  - et al.
- 1992
- IEEE Electron Device Letters
Trench storage capacitors for high density DRAMs
- - T.V. Rajeevakumar
  - T. Lii
  - et al.
- 1991
- IEDM 1991