Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
K.N. Tu
Materials Science and Engineering: A