A. Reisman, M. Berkenblit, et al.
JES
No abstract available.
A. Reisman, M. Berkenblit, et al.
JES
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010