Publication
IRPS 2018
Conference paper

Reliability benefits of a metallic liner in confined PCM

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Abstract

We demonstrate outstanding resistance-drift (R-drift) mitigation and void elimination as reliability benefits of a thin metallic liner. By tuning the resistivity of the liner, the confined PCM with a metallic liner yields an extremely low R-drift coefficient (∼0.01). We also show for the first time that confined PCM could have a self-recovering property by incorporating a metallic liner. The experimental results with real-time in-situ transmission electron microscope (TEM) exhibit the robustness of the confined PCM that can recover by itself without any extra circuits.

Date

25 May 2018

Publication

IRPS 2018

Authors

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