Abstract
The switching current of Spin Torque Magnetic Random Access Memory (MRAM) can be reduced significantly by using perpendicularly magnetized materials. The Ta|CoFeB|MgO system provides both high tunneling magnetoresistance and perpendicular anisotropy. Using this materials system we have demonstrated basic write functionality in fully integrated Spin Torque MRAM arrays. Here, we further demonstrate device scaling down to 20 nm diameter, opening up the possibility of ultra-dense Spin Torque MRAM. © 2012 IEEE.