Process integration of self-assembled polymer templates into silicon nanofabrication

K.W. Guarini; C.T. Black; Y. Zhang; H. Kim; E. Sikorski; I. Babich

doi:10.1116/1.1521730

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Paper

09 Dec 2002

Process integration of self-assembled polymer templates into silicon nanofabrication

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Abstract

A set of key processes for nanometer-scale pattern transfer using a self-assembled polymer mask was developed and integrated. As a result, a variety of silicon nanostructures were built.

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