Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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6 results for H. Kim

High-capacity, self-assembled metal-oxide-semiconductor decoupling capacitors
- - Charles T. Black
  - Kathryn W. Guarini
  - et al.
- 2004
- IEEE Electron Device Letters
Thermally robust dual-work function ALD-MN _x MOSFETs using conventional CMOS process flow
- - D.-G. Park
  - Z. Luo
  - et al.
- 2004
- VLSI Technology 2004
Does line edge roughness matter?: FEOL and BEOL perspectives
- - Qinghuang Lin
  - Chuck Black
  - et al.
- 2003
- Microlithography 2003
The growth of tantalum thin films by plasma-enhanced atomic layer deposition and diffusion barrier properties
- - H. Kim
  - C. Cabral Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Process integration of self-assembled polymer templates into silicon nanofabrication
- - K.W. Guarini
  - C.T. Black
  - et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
- - H. Kim
  - C. Cabral
  - et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures