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American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Paper
01 Apr 1997

Nanoscopically engineered organic-inorganic hybrids as low dielectric constant, high modulus insulating materials for microelectronic applications

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Date

01 Apr 1997

Publication

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Authors

  • J.L. Hedrick
  • R.D. Miller
  • D.Y. Yoon
  • H.J. Cha
  • H.R. Brown
  • S.A. Srinivasan
  • R. Di Pietro
  • V. Flores
  • J.P. Hummel
  • R.F. Cook
  • E. Liniger
  • E. Simonyi
  • D.P. Klaus
IBM-affiliated at time of publication

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