Nanoscopically engineered organic-inorganic hybrids as low dielectric constant, high modulus insulating materials for microelectronic applications

K.R. Carter, H.J. Cha, et al.

MRS Spring Meeting 1995

P. Lazzeri, L. Vanzetti, et al.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

H.J. Cha, J.L. Hedrick, et al.

Applied Physics Letters

K.R. Carter, H.J. Cha, et al.

MRS Spring Meeting 1995