Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
New imide-aryl ether copolymers containing a 1,2,4-triazole heterocyclic unit were prepared, and their structural, mechanical and thermal properties were studied. These copolymers contain an aryl ether 1,2,4-triazole linkage, which was incorporated into a semi-rigid backbone by the reaction of new 1,2,4-triazole diamines with 4,4′-oxydianiline (ODA) and pyromellitic dianhydride (PMDA). The 1,2,4-triazole diamines were prepared through a nucleophilic aromatic substitution reaction of 3,5-bis(4′-fluorophenyl)-4-phenyl-1,2,4-triazole with either 3- or 4-aminophenol in the presence of K2CO3 in a polar aprotic solvent mixture to afford 3,5-bis(3′-aminophenoxyphenyl)-4-phenyl-1,2,4-triazole and 3,5-bis(4′-aminophenoxyphenyl)-4-phenyl-1,2,4-triazole, respectively. The monomers were reacted with PMDA or co-reacted with ODA and PMDA to synthesize the desired poly(amic acid)s. Films were cast and cured at 350°C to effect imidization, producing films with good mechanical properties. © 1993.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films