Conference paperSelf-assembling materials for lithographic patterning: Overview, status and moving forwardWilliam Hinsberg, Joy Cheng, et al.SPIE Advanced Lithography 2010
PaperIon beam patterning of block copolymer thin filmsRanulfo Allen, John Baglin, et al.J. Photopolym. Sci. Tech.
Conference paperEffects of KrF laser radiation on fused-silica glass: a comparison of samples exposed in air vs vacuumI.K. Pour, D.J. Krajnovich, et al.SPIE Optical Materials for High Average Power Lasers 1992
