Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
No abstract available.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008