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Semiconductor Science and Technology
Review

Measurements of radioactive contaminants in semiconductor materials

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Abstract

The emission of alpha particles from materials used to manufacture semiconductors can contribute substantially to the single-event upset rate. The alpha particles originate from contamination in the materials, or from radioactive isotopes, themselves. In this review paper, we discuss the sources of the radioactivity and the measurement methods to detect the emitted particles.

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Semiconductor Science and Technology

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