Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report on systematic experimental mapping of the transmission properties of two-dimensional silicon-on-insulator photonic crystal waveguides for a broad range of hole radii, slab thicknesses, and waveguide lengths for both TE and TM polarizations. Detailed analysis of numerous spectral features allows a direct comparison of experimental data with three-dimensional plane-wave and finite-difference time-domain calculations. We find that the bandwidth for low-loss propagation completely vanishes for structural parameters where the photonic band gap is maximized. Our results demonstrate that in order to maximize the bandwidth of low-loss waveguiding the hole radius must be significantly reduced. While the photonic band gap considerably narrows, the bandwidth of low-loss propagation in PhC waveguides is increased up to 125nm with losses as low as 8±2dB/cm. © 2005 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
K.N. Tu
Materials Science and Engineering: A
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME