E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
The ignition and onset latchup events related to I/O circuits were discussed. Latchup events were detected by monitoring the amount of current absorbed by the circuit during its operations. The events leading up to latchup for different I/O pins and the factors affecting the latchup sensitivity of a circuit were also discussed.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films