C.R. Jones, F.A. Houle, et al.
Applied Physics Letters
Rates of photothermal gold deposition onto alumina substrates heated by a focused argon-ion laser beam were measured by determining the time required for deposits to grow through the focal spot of a HeNe laser probe beam directed parallel to the substrate. Deposition rates from 0.25 to 6 μm/s were measured for deposits with heights ranging from 5 to 100 μm. Rates of gold deposition using dimethyl gold hexafluoroacetylacetonate as a precursor depend linearly on the gold precursor partial pressure and for a wide variety of conditions do not depend on the laser power or focal spot diameter. A theory is presented to describe reactant mass transfer-controlled deposition with and without buffer gas. Comparison of measured with calculated growth rates showed that gold deposition rates using dimethyl gold hexafluoroacetylacetonate as a precursor were transport limited for the conditions studied. Theory and experiment also showed that the deposition rate decreases inversely with increasing buffer gas pressure above a critical pressure.
C.R. Jones, F.A. Houle, et al.
Applied Physics Letters
P.B. Comita, Carl E. Larson
MRS Spring Meeting 1994
T.T. Kodas, E.M. Engler, et al.
Applied Physics Letters
J.F. Moore, D.R. Strongin, et al.
Applied Physics Letters