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Publication
CLEO 1984
Conference paper
PROJECTION PRINTING OF GOLD MICROPATTERNS BY LASER PHOTOCHEMICAL VAPOR DEPOSITION.
Abstract
Summary form only given, as follows. Gold microcircuit patterns have been generated by excimer laser photolysis of a volatile gold complex. Linewidths as fine as 2 mu m were readily obtained utilizing an optical projection system. This single-step-all-dry process makes it possible to produce Au films of variable thicknesses by varying the ttal laser energy dose. X-ray photoelectron spectroscopic analysis f photodeposits was carried out to determine the film content and purity. These studies reveal a wavelength dependence on the gold film composition for identical laser power densities and total energy dose.