PROJECTION PRINTING OF GOLD MICROPATTERNS BY LASER PHOTOCHEMICAL VAPOR DEPOSITION.

Abstract

Summary form only given, as follows. Gold microcircuit patterns have been generated by excimer laser photolysis of a volatile gold complex. Linewidths as fine as 2 mu m were readily obtained utilizing an optical projection system. This single-step-all-dry process makes it possible to produce Au films of variable thicknesses by varying the ttal laser energy dose. X-ray photoelectron spectroscopic analysis f photodeposits was carried out to determine the film content and purity. These studies reveal a wavelength dependence on the gold film composition for identical laser power densities and total energy dose.