Conference paper
Kinetics of chemically amplified resists
G.M. Wallraff, W.D. Hinsberg, et al.
Microlithography 1995
The first laser-induced deposition of copper has been demonstrated using a volatile copper coordination complex. The technique is characterized by reasonable rates and by the high quality of copper produced.
G.M. Wallraff, W.D. Hinsberg, et al.
Microlithography 1995
T.H. Baum, Carl E. Larson
High temperature science
G.M. Wallraff, D. Medeiros, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
C.R. Moylan, T.H. Baum, et al.
Applied Physics A Solids and Surfaces