Conference paper
Evaluation of 32nm Advanced immersion lithography pellicles
N. Zhou, K. Racette, et al.
SPIE Photomask Technology + EUV Lithography 2008
Paper
Laser chemical vapor deposition of copper
Abstract
The first laser-induced deposition of copper has been demonstrated using a volatile copper coordination complex. The technique is characterized by reasonable rates and by the high quality of copper produced.
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