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Chemistry of Materials
The resistivity of ultrathin metallic films on semiconductor surfaces can be obtained from inelastic electron scattering measurements. Illustrative applications to Au and Pd films on Si(111) and to Ag films on GaAs(111) are presented. A general discussion about the nature of the quasi-elastic peak in EELS from various surfaces is also presented. © 1986.
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
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SPIE Advanced Lithography 2010
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SPIE Advances in Semiconductors and Superconductors 1990
K.N. Tu
Materials Science and Engineering: A