T.N. Jackson, P. Solomon, et al.
IEEE T-ED
No abstract available.
T.N. Jackson, P. Solomon, et al.
IEEE T-ED
S. Nelson, K. Ismail, et al.
Applied Physics Letters
S.L. Wright, P. Solomon, et al.
Applied Physics Letters
C.M. Ransom, P. Spirito
Symposium on Plasma Processing 1986