Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Motivated by service systems with time-varying customer arrivals, we consider a fluid model as a macroscopic approximation for many-server Markovian queues alternating between underloaded and overloaded intervals. Our main result is a refinement of the piecewise stationary approximation (PSA) for the stationary distribution of the fluid model. The form of the refined approximation suggests simple metrics for assessing the accuracy of PSA for underloaded and overloaded intervals respectively. © 2012 Elsevier B.V. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems
Hannaneh Hajishirzi, Julia Hockenmaier, et al.
UAI 2011
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University