Review

09 Aug 2011

Effects of collector take‐off angle and energy filtering on the BSE image in the SEM

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Abstract

No abstract available.

Paper

Reduction of edge penetration effect in the scanning electron microscope

Oliver C. Wells

Scanning

Paper

Application of the low-loss scanning electron microscope image to integrated circuit technology part II - Chemically-mechanically planarized samples

Oliver C. Wells, Maurice McGlashan-Powell, et al.

Scanning

Paper

Examining deep holes by rocking the beam in the scanning electron microscope

Oliver C. Wells

Review of Scientific Instruments

Conference paper

The history and future of the SEM - A personal view

Oliver C. Wells

M&M 2006

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