About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Paper
New contrast mechanism for scanning electron microscope
Abstract
With normal electron incidence, the resolution of the backscattered electron image in the scanning electron microscope (SEM) is approximately equal to the classical electron pentration depth. With oblique electron incidence, a significant number of plurally scattered electrons leave the specimen in an apparently specular direction after penetrating for a distance that is an order of magnitude smaller than this. Thus with 15-keV electrons incident onto Al at 45°, a significant number of backscattered electrons leave the specimen after penetrating to less than 500-a.u. depth. These electrons can be collected over an angle that is close to the plane of the specimen surface. Other electrons leave the specimen more nearly at right angles to the surface, and these have been scattered from a greater depth. The image in the SEM can change completely if the position of the collector is changed. © 1970 The American Institute of Physics.