PublicationADMETA 2010Conference paperComparative study of CVD TiN vs. ALD TiN for contact metallization in 32nm node and beyondADMETA 2010AbstractNo abstract available.Home↳ PublicationsDate01 Dec 2010PublicationADMETA 2010AuthorsValli ArunachalamFilippos PapadatosKeith WongC.-H. ShinJ. StraneA. XingWoo-Hyeong LeeHaoren ZhuangJin WallnerC.-Y. XiaoLeo TaiPatrick DeHavenK. MillerV. SchroederShurong LiangMichael P ChudzikIBM-affiliated at time of publicationTopicsPhysical SciencesShare
