Conference paperImaging at high beam energies in the scanning electron microscopeL. Gignac, S.H. Boettcher, et al.M&M 2006
PaperHigh-quality aluminum oxide gate dielectrics by ultra-high-vacuum reactive atomic-beam depositionS. Guha, E. Cartier, et al.Journal of Applied Physics
Conference paperCorrelation of electromigration lifetime distribution to failure mode in dual Damascene Cu/SiLK interconnectsL. Gignac, C.-K. Hu, et al.Microelectronic Engineering
Conference paperEffects of overlayers on electromigration reliability improvement for Cu/low K interconnectsC.-K. Hu, D. Canaperi, et al.IRPS 2004
