Conference paper
Extendibility of Cu damascene to 0.1 μm wide interconnections
C.-K. Hu, K.Y. Lee, et al.
MRS Spring Meeting 1998
No abstract available.
C.-K. Hu, K.Y. Lee, et al.
MRS Spring Meeting 1998
C.-K. Hu, D. Canaperi, et al.
IRPS 2004
C.-K. Hu, L. Gignac, et al.
International Workshop on Stress-Induced Phenomena in Metallization 2007
C.-K. Hu, J. Ohm, et al.
Journal of Applied Physics