B.C. Stipe, H.J. Mamin, et al.
Physical Review Letters
A measured force resolution of 5.6×10-18 N/√Hz at 4.8 K in vacuum using a single-crystal silicon cantilever only 600 Å thick is demonstrated. The spring constant of this cantilever was 6.5×10-6 N/m, or more than 1000 times smaller than that of typical atomic force microscope cantilevers. The cantilever fabrication includes the integration of in-line tips so that the cantilever can be oriented perpendicular to a sample surface. This orientation helps suppress cantilever snap-in so that high force sensitivity can be realized for tip-sample distances less than 100 Å. © 1997 American Institute of Physics.
B.C. Stipe, H.J. Mamin, et al.
Physical Review Letters
H.J. Mamin, R.P. Ried, et al.
INVMTC 1998
G. Binnig, M. Despont, et al.
Applied Physics Letters
B.W. Chui, T.W. Kenny, et al.
Applied Physics Letters