Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using a unique cylindrical optical arrangement, we have coupled out a Cherenkcv electromagnetic shock wave from the confining dielectric substrate and have used this shock wave as a source to produce freely-propagating terahertz beams. The shock wave is initially generated by a surface-dipole distribution propagating faster than the phase velocity in the underlying dielectric substrate. © 1989 IEEE
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Peter J. Price
Surface Science
J. Tersoff
Applied Surface Science
J.H. Stathis, R. Bolam, et al.
INFOS 2005