A decade ago, when IBM announced the world's first 7nm process technology, we said that EUV lithography would be necessary to enable that technology. Since then, it’s become the industry standard, and researchers are now looking at what comes next. To design and create the next generation of chips, ASML recently started shipping the next generation of EUV machines, called High NA (or numerical aperture) EUV, which can produce even smaller dimensions on a wafer with a high yield of usable chips.
The Albany NanoTech Complex is currently in the process of building a new research and development fabrication facility on its campus to house a High NA EUV machine, which will be the first public-private High NA EUV machine in North America. As construction continues, IBM researchers have already been working on machines at ASML’s facility in the Netherlands, and are making breakthroughs demonstrating the potential for future chip designs.
There’s around 150,000 sq ft of clean room space at Albany NanoTech, and NY CREATES is already planning to build another 50,000 sq ft in part to hold its High-NA EUV machine when it arrives. With the award of the NSTC EUV Center, NY CREATES says it should only take about three months to get operational with Natcast, and it can build even more space — up to another 100,000 sq ft — for future clean rooms as needed for the added research and development interest this will bring.
“The NSTC EUV Center will provide NSTC members with access to EUV technology to facilitate a wider range of research and a path to commercialization, including technologies with the most challenging feature sizes,” Natcast shared. "In addition to access to EUV technology, this center will also provide appropriate space for Natcast researchers and staff as well as member assignees to conduct research and collaborate in the facility.”
This is just the latest in a long string of breakthroughs and partnerships that have thrived in the upper Hudson Valley in the world of semiconductors, with IBM often at the forefront. “For 20 years, IBM and our partners at the Albany NanoTech Complex have worked together to create a thriving public-private ecosystem,” said IBM CEO Arvind Krishna. Now, with one of the most advanced semiconductor R&D facilities in North America, Albany is uniquely well positioned to support the United States in its mission to become a global semiconductor leader.