Fabrication, Characterization, and modeling of fully-Batch-Fabricated piston-Type electrodynamic microactuators
- Shashank G. Sawant
- Naigang Wang
- et al.
- 2014
- JMEMS
Paper
Publications
28 results at JMEMS
NiCr MEMS tactile sensors embedded in polyimide toward smart skin
- Rohit Kilaru
- Zeynep Celik-Butler
- et al.
- 2013
- JMEMS
PaperThermoelectric characterization and power generation using a silicon-on-insulator substrate
- Jaeho Lee
- Sangbum Kim
- et al.
- 2012
- JMEMS
PaperWafer-level transfer technologies for PZT-based RF MEMS switches
- Roland Guerre
- Ute Drechsler
- et al.
- 2010
- JMEMS
PaperReal-time models of electrostatically actuated cantilever probes with integrated thermal sensor for nanoscale interrogation
- Pranav Agarwal
- Deepak R. Sahoo
- et al.
- 2010
- JMEMS
PaperBi2Te3-based flexible micro thermoelectric generator with optimized design
- Wulf Glatz
- Etienne Schwyter
- et al.
- 2009
- JMEMS
PaperControlled thermophoresis as an actuation mechanism for noncantilevered MEMS devices
- Brend Gotsmann
- Michel Despont
- et al.
- 2008
- JMEMS
PaperModeling and experimental identification of silicon microheater dynamics: A systems approach
- Abu Sebastian
- Dorothea Wiesmann
- 2008
- JMEMS
PaperSelective transfer technology for microdevice distribution
- Roland Guerre
- Ute Drechsler
- et al.
- 2008
- JMEMS
PaperNovel reliable RF capacitive MEMS switches with photodefinable metal-oxide dielectrics
- Guoan Wang
- Michael Romeo
- et al.
- 2007
- JMEMS
Paper