Harish Bhaskaran, Abu Sebastian, et al.
Review of Scientific Instruments
A microelectromechanical system actuator based on thermophoretic, or Knudson, forces is proposed using analytical calculations. It can potentially execute scanning or spinning motions of a body that is not mechanically attached to the reference substrate. For a silicon device of 100-μm diameter, it is calculated that it can be levitated at a distance of about 0.5 μm from a substrate and that it can execute scanning motion and use quasi-springs by laterally acting thermal forces. In this way, an engine with spinning motion of a floating body having a diameter of 200 μm with up to 5 kHz can be achieved. [2008-0013]. © 2008 IEEE.
Harish Bhaskaran, Abu Sebastian, et al.
Review of Scientific Instruments
Colin Rawlings, Urs Duerig, et al.
IEEE TNANO
Colin D. Rawlings, Heiko Wolf, et al.
ACS Nano
Felix Holzner, Cyrill Kuemin, et al.
Nano Letters