Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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12 results at ECS J. Solid State Sci. Technol.

Crystallization Properties of Al-Sb Alloys for Phase Change Memory Applications
- - Rubab Ume
  - Haibo Gong
  - et al.
- 2021
- ECS J. Solid State Sci. Technol.
Understanding the Reasons behind Defect Levels in Post-Copper-CMP Cleaning Processes with Different Chemistries and PVA Brushes
- - Y. Sampurno
  - A. Philipossian
  - et al.
- 2021
- ECS J. Solid State Sci. Technol.
Process Co-Optimization of CVD and CMP for Tungsten Metallization
- - Shanti Pancharatnam
  - Wei Tsu Tseng
  - et al.
- 2020
- ECS J. Solid State Sci. Technol.
CMP development for Ru liner structures beyond 14nm
- - R. Patlolla
  - Koichi Motoyama
  - et al.
- 2018
- ECS J. Solid State Sci. Technol.
Accurate measurement of porous low-k thin-films by nanoindentation: Densification scaling versus substrate effects
- - Krystelle Lionti
  - Kumar Virwani
  - et al.
- 2017
- ECS J. Solid State Sci. Technol.
Low hydrogen silicon carbon nitride cap for high performance sub-10 nm Cu-low k interconnect
- - Son Van Nguyen
  - Shobha Hosadugra
  - et al.
- 2017
- ECS J. Solid State Sci. Technol.
A study on the long-term degradation of crystalline silicon solar cells metallized with Cu electroplating
- - Qiang Huang
  - K.B. Reuter
  - et al.
- 2015
- ECS J. Solid State Sci. Technol.
A study on the electrodeposition and silicidation of Nickel-Cobalt alloys for silicon photovoltaic cell metallization
- - Qiang Huang
- 2015
- ECS J. Solid State Sci. Technol.
Light assisted electrodeposition and silicidation of Ni for silicon photovoltaic cell metallization
- - Qiang Huang
  - Satyavolu S. Papa Rao
  - et al.
- 2015
- ECS J. Solid State Sci. Technol.
Microreplicated conditioners for Cu barrier chemical-mechanical planarization (CMP)
- - Wei-Tsu Tseng
  - Sana Rafie
  - et al.
- 2015
- ECS J. Solid State Sci. Technol.