Crystallization Properties of Al-Sb Alloys for Phase Change Memory Applications
- 2021
- ECS J. Solid State Sci. Technol.
Publications
This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
12 results at ECS J. Solid State Sci. Technol.
Understanding the Reasons behind Defect Levels in Post-Copper-CMP Cleaning Processes with Different Chemistries and PVA Brushes
- 2021
- ECS J. Solid State Sci. Technol.
Process Co-Optimization of CVD and CMP for Tungsten Metallization
- 2020
- ECS J. Solid State Sci. Technol.
CMP development for Ru liner structures beyond 14nm
- 2018
- ECS J. Solid State Sci. Technol.
Accurate measurement of porous low-k thin-films by nanoindentation: Densification scaling versus substrate effects
- 2017
- ECS J. Solid State Sci. Technol.
Low hydrogen silicon carbon nitride cap for high performance sub-10 nm Cu-low k interconnect
- 2017
- ECS J. Solid State Sci. Technol.
A study on the long-term degradation of crystalline silicon solar cells metallized with Cu electroplating
- 2015
- ECS J. Solid State Sci. Technol.
A study on the electrodeposition and silicidation of Nickel-Cobalt alloys for silicon photovoltaic cell metallization
- 2015
- ECS J. Solid State Sci. Technol.
Light assisted electrodeposition and silicidation of Ni for silicon photovoltaic cell metallization
- 2015
- ECS J. Solid State Sci. Technol.
Microreplicated conditioners for Cu barrier chemical-mechanical planarization (CMP)
- 2015
- ECS J. Solid State Sci. Technol.