A novel, selective, freelayer wet etching method for magnetic tunnel junction-based MRAM
- E.J.M. O'Sullivan
- 2006
- ECS Meeting 2006
Conference paper
Publications
15 results at ECS Meeting 2006
FeCo/Cu and FeCo/Ru laminated structures by electrodeposition
- Q. Huang
- C. Bonhôte
- et al.
- 2006
- ECS Meeting 2006
Conference paperElectrodeposition of FeCoRu alloy
- Q. Huang
- C. Bonhôte
- et al.
- 2006
- ECS Meeting 2006
Conference paperInfluence of alloying elements on the formation and stability of NiSi
- C. Detavernier
- D. Deduytsche
- et al.
- 2006
- ECS Meeting 2006
Conference paperThermal stability of HfN compounds on HfO2/SiO2 gate stacks
- A.C. Callegari
- M. Gribelyuk
- et al.
- 2006
- ECS Meeting 2006
Conference paperComparison of electromigration in Cu interconnects with ALD or PVD TaN liners
- C.-K. Hu
- L. Gignac
- et al.
- 2006
- ECS Meeting 2006
Conference paperPushing the performance limits of SiGe HBT technology
- Marwan Khater
- Thomas Adam
- et al.
- 2006
- ECS Meeting 2006
Conference paperHigh mobility strained Ge / SiGe PMOSFETs for high performance CMOS
- Huiling Shang
- J.O. Chu
- et al.
- 2006
- ECS Meeting 2006
Conference paperHigh mobility channels for ultimate CMOS
- D.K. Sadana
- S.J. Koester
- et al.
- 2006
- ECS Meeting 2006
Conference paperSubstrate engineering for germanium-based CMOS technology
- S.W. Bedell
- K.E. Fogel
- et al.
- 2006
- ECS Meeting 2006
Conference paper