Publications

233 results at Proceedings of SPIE 1989

Ablation of polymers and tissue by ultraviolet lasers
- - R. Srinivasan
- 1989
- Proceedings of SPIE 1989
Two-regime ablative hole formation process in tellurium and tellurium-alloy films
- - M. Chen
  - V. Marrello
  - et al.
- 1989
- Proceedings of SPIE 1989
Reading and writing of photochemical holes using gaalas diode lasers
- - P. Pokrowsky
  - W.E. Moerner
  - et al.
- 1989
- Proceedings of SPIE 1989
Condenser aberrations in Köhler illumination
- - Douglas S. Goodman
  - Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989
Aqueous base developable deep uv resist systems based on novel monomeric and polymeric dissolution inhibitors
- - Hiroshi Ito
- 1989
- Proceedings of SPIE 1989
Practical characterization of 0.5 μm optical lithography
- - Donis G. Flagello
  - Andrew T. S. Pomerene
- 1989
- Proceedings of SPIE 1989
Gel resist processing for submicron CMOS and bipolar circuits
- - K.E. Petrillo
  - M. Smyth
  - et al.
- 1989
- Proceedings of SPIE 1989
Bench evaluation of lithographic lenses from measurements of the point spread function
- - Norman Bobroff
  - Petra Fadi
  - et al.
- 1989
- Proceedings of SPIE 1989
Chemical and physical aspects of multilayer resist processing
- - J. Paraszczak
  - E. Babich
  - et al.
- 1989
- Proceedings of SPIE 1989
Metrology with an atomic force microscope
- - P.C.D. Hobbs
  - H.K. Wickramasinghe
- 1989
- Proceedings of SPIE 1989