Crystallinity and wet etch behavior of HfO2 films grown by MOCVD
- Katherine L. Saenger
- Cyril Cabral Jr.
- et al.
- 2003
- MRS Proceedings 2003
Publications
93 results at MRS Proceedings
Growth of perovskites with crystalline interfaces on Si(100)
- G.J. Norga
- A. Guiller
- et al.
- 2003
- MRS Proceedings 2003
Electrical characteristics of metal - (La0.27Y 0.73)2O3 - Silicon capacitors
- E.J. Preisler
- N.A. Bojarczuk
- et al.
- 2003
- MRS Proceedings 2003
Probing strain fields about thin film structures using x-ray microdiffraction
- C.E. Murray
- I.C. Noyan
- et al.
- 2003
- MRS Proceedings 2003
Mechanical Modeling of the 2D Interfacial Slurry Pressure in CMP
- C. Fred Higgs III
- Sum Huan Ng
- et al.
- 2003
- MRS Proceedings 2003
Epitaxial Si films grown on lattice matched (LaxY 1-x)O3/Si (111) structures by molecular beam epitaxy
- V. Narayanan
- S. Guha
- et al.
- 2002
- MRS Proceedings 2002
Ferroelectric field effect device
- A.G. Schrott
- J. Misewich
- et al.
- 2002
- MRS Proceedings 2002
Free standing silicon as a compliant substrate for SiGe
- G.M. Cohen
- P.M. Mooney
- et al.
- 2003
- MRS Proceedings 2003
Flexible Magnetics: Magnetic Lithography and Fabrication of Magnetic Masks on Thin Plastic Substrates
- Z.Z. Bandić
- H. Xu
- et al.
- 2003
- MRS Proceedings 2003
Free standing silicon as a compliant substrate for SiGe
- G.M. Cohen
- P.M. Mooney
- et al.
- 2003
- MRS Proceedings 2003