Nanoscale strain characterization in microelectronic materials using X-ray diffraction
- Conal E. Murray
- Andrew Ying
- et al.
- 2012
- Powder Diffraction
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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17 results at Powder Diffraction
Real-space strain mapping of SOI features using microbeam X-ray diffraction
- Conal E. Murray
- S. Polvino
- et al.
- 2008
- Powder Diffraction
Mechanics of microelectronics structures as revealed by X-ray diffraction
- Conal E. Murray
- H. Yan
- et al.
- 2007
- Powder Diffraction
Spatially transient stress effects in thin films by X-ray diffraction
- C.E. Murray
- C.C. Goldsmith
- et al.
- 2005
- Powder Diffraction
Strain effects in thin film/Si substrates revealed by X-ray microdiffraction
- C.E. Murray
- I.C. Noyan
- et al.
- 2004
- Powder Diffraction
A study of X-ray reflectivity data analysis methods for thin film thickness determination
- D.T. Brower
- R.E. Revay
- et al.
- 1996
- Powder Diffraction
Establishing an Instrumental Peak Profile Calibration Standard for Powder Diffraction Analyses: International Round Robin Conducted by the JCPDS-ICDD and the U.S. National Bureau of Standards
- T.G. Fawcett
- C.E. Crowder
- et al.
- 1988
- Powder Diffraction