Magnetic field enhanced reactive ion etching of polyimide
- J.T.C. Yeh
- K.R. Grebe
- et al.
- 1984
- JVSTA
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176 results at JVSTA
Chemical reaction and silicide formation at the Pt/Si interface
- R. Mate
- R.J. Purtell
- et al.
- 1984
- JVSTA
The Adsorption of PH3 on Si(100) and its Effect on the Coadsorption of SiH4
- Ming L. Yu
- B.S. Meyerson
- 1984
- JVSTA
Summary Abstract: How many metal atoms are involved in dissociative chemisorption?
- C.R. Brundle
- J. Behm
- et al.
- 1984
- JVSTA
Metal clusters in plasma polymerized fluorocarbon films: Cobalt-aluminum
- Eric Kay
- M. Hecq
- et al.
- 1984
- JVSTA
Helium scattering from (1 × 1) H-Pt(111)
- Inder P. Batra
- J.A. Barker
- et al.
- 1984
- JVSTA
Summary Abstract: Excited states of physisorbed and chemisorbed adsorbates and their decay mechanisms
- Ph. Avouris
- J.E. Demuth
- et al.
- 1984
- JVSTA
Barrier Layers: Principles and applications in microelectronics
- Marc Wittmer
- 1984
- JVSTA
Grain structure variation with temperature for evaporated metal films
- H.T.G. Hentzell
- C.R.M. Grovenor
- et al.
- 1984
- JVSTA
Summary Abstract: Surface processes in plasma-assisted etching environments
- Harold F. Winters
- J.W. Coburn
- et al.
- 1983
- JVSTA