Vacuum pump fluids

Organic fluids are used in rotary vane and piston, lobe blowers, turbomolecular, and diffusion pumps. They lubricate, seal, cool, or transfer momentum. We review the properties of pump fluids, why they are important, and how they are (or are not) characterized. The fluids currently used in vacuum pumps are highly refined mineral oils, and synthetic esters, silicones, ethers, fluorosilicones, and fluorocarbons. We describe the properties, types, and selection of fluids for several applications including pumping of oxygen and hazardous gases. © 1984, American Vacuum Society. All rights reserved.