Microcolumn based low energy e-beam writing
- C. Stebler
- M. Despont
- et al.
- 1996
- Microelectronic Engineering
Publications
221 results at Microelectronic Engineering
Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
Microfabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering
Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- Juan R. Maldonado
- Ron DellaGuardia
- et al.
- 1995
- Microelectronic Engineering
Stress induced leakage currents in thin oxides
- D.J. DiMaria
- 1995
- Microelectronic Engineering
Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- G.M. Wallraff
- John M. Hutchinson
- et al.
- 1995
- Microelectronic Engineering
Enhanced e-beam system for the fabrication of optical elements
- D. Prongue ́
- H. Rothuizen
- et al.
- 1995
- Microelectronic Engineering
Micromechanical structures for data storage
- T.C. Reiley
- L.-S. Fan
- et al.
- 1995
- Microelectronic Engineering
A new mask lithography tool for advanced mask manufacturing
- B.J. Grenon
- H.C. Hamaker
- et al.
- 1995
- Microelectronic Engineering
Dissociation kinetics of hydrogen-passivated (100) Si SiO2 interface defects
- 1995
- Microelectronic Engineering