Publications

221 results at Microelectronic Engineering

Electron beam technology - SEM to microcolumn
- - T.H.P. Chang
  - M.G.R. Thomson
  - et al.
- 1996
- Microelectronic Engineering
Scaling silicon MOS devices to their limits
- - S.J. Wind
  - D.J. Frank
  - et al.
- 1996
- Microelectronic Engineering
A new mask lithography tool for advanced mask manufacturing
- - B.J. Grenon
  - H.C. Hamaker
  - et al.
- 1995
- Microelectronic Engineering
Doping profiling with scanning surface harmonic microscopy
- - M. Johnson
  - J.P. Bourgoin
  - et al.
- 1995
- Microelectronic Engineering
Atomic-scale analysis of quantum nanostructures with the STM
- - M. Johnson
  - M. Pfister
  - et al.
- 1995
- Microelectronic Engineering
Dissociation kinetics of hydrogen-passivated (100) Si SiO₂ interface defects
- - J.H. Stathis
- 1995
- Microelectronic Engineering
Fabrication of Aharonov-Bohm rings in Si/SiGe heterostructure
- - K.Y. Lee
  - K. Ismail
  - et al.
- 1995
- Microelectronic Engineering
Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- - Juan R. Maldonado
  - Ron DellaGuardia
  - et al.
- 1995
- Microelectronic Engineering
Atomic hydrogen-induced degradation of the Si SiO₂ structure
- - E. Cartier
  - J.H. Stathis
- 1995
- Microelectronic Engineering
Stress induced leakage currents in thin oxides
- - D.J. DiMaria
- 1995
- Microelectronic Engineering